发明名称 METHOD AND SYSTEM FOR TEMPLATE ASSISTED WAFER BONDING USING PEDESTALS
摘要 <p>A method of fabricating a composite semiconductor structure includes providing a first substrate comprising a first material and having a first surface and forming a plurality of pedestals extending to a predetermined height in a direction normal to the first surface. The method also includes attaching a plurality of elements comprising a second material to each of the plurality of pedestals, providing a second substrate having one or more structures disposed thereon, and aligning the first substrate and the second substrate. The method further includes joining the first substrate and the second substrate to form the composite substrate structure and removing at least a portion of the first substrate from the composite substrate structure.</p>
申请公布号 WO2013103769(A1) 申请公布日期 2013.07.11
申请号 WO2013US20226 申请日期 2013.01.04
申请人 SKORPIOS TECHNOLOGIES, INC. 发明人 MARCHENA, ELTON
分类号 H01L21/822 主分类号 H01L21/822
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