PARTICLE RECOVERY APPARATUS HAVING LIQUID FILTER PART

摘要

The present invention relates to a particle recovery apparatus having a liquid filter part. The particle recovery apparatus according to the present invention includes: a liquid filter part receiving liquid for filtering particles; an inflow tube introducing the particles into the liquid in a state where a portion of the inflow tube is immersed within the liquid contained in the liquid filter part; a recovery part recovering the liquid contained in the liquid filter part; and a pump connection part connecting a vacuum pump to the liquid filter part.