| 摘要 |
PROBLEM TO BE SOLVED: To replace a chip in a short time in a scribe device.SOLUTION: A chip 14 is rotatably attached to a chip holder 10. The chip holder 10 is made into a cylindrical shape and its tip end has an attachment unit 16. An opening is arranged at a holder joint. The chip holder 10 is adsorbed by a magnet for attachment so that detaching can be performed easily. Chip offset data is recorded as a two-dimensional code 17 on the surface of the chip holder 10. When replacing the chip holder, the offset data is read out and is input to a scribe device, thereby canceling the offset. This eliminates the operation required for correction when detaching the chip holder and enables easy chip replacement during a short time of device stop. |
