| 摘要 |
A semiconductor device includes, a semiconductor substrate, a plurality of memory cells being provided on the semiconductor substrate in a memory cell region. Each of the plurality of memory cells having a first gate electrode disposed on the semiconductor substrate with a first gate insulating film, and the first gate electrode having a first charge storage layer, a first inter-electrode insulating film and a first control gate electrode film, and a cavity is interposed between an upper surface of the charge storage layer and the inter-electrode insulating film.
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