| 发明名称 |
REACTIVE-SPECIES SUPPLY DEVICE AND SURFACE TREATMENT APPARATUS |
| 摘要 |
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
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| 申请公布号 |
US2013174984(A1) |
申请公布日期 |
2013.07.11 |
| 申请号 |
US201113807249 |
申请日期 |
2011.06.30 |
| 申请人 |
HORI MASARU;KANO HIROYUKI;KAWASUMI TETSUNORI;YOSHIDA NAOFUMI;KAWAJIRI AKIHIRO;WATANABE TOSHIMITSU;ISOZUMI JOJI;NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY;FUJI MACHINE MFG. CO., LTD. |
发明人 |
HORI MASARU;KANO HIROYUKI;KAWASUMI TETSUNORI;YOSHIDA NAOFUMI;KAWAJIRI AKIHIRO;WATANABE TOSHIMITSU;ISOZUMI JOJI |
| 分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
| 代理机构 |
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