Method for spectroscopic examining measurement object, involves forming combination spectrum to eliminate changes in spectral composition and detected measurement radiation and determine property of material sample

摘要

The method involves irradiating measurement radiation (300) of predetermined spectral composition on measurement object (200). The layer thicknesses of material sample (210) are measured. The combination spectrum is formed from difference of two individual spectrums from two measured spectra to eliminate changes in spectral composition and detected measurement radiation. The combination spectrum is utilized for determining property of material sample due to transmission through outer casing (220). Independent claims are included for the following: (1) device for spectroscopic examining measurement object; and (2) measurement arrangement for spectroscopic examining measurement object.