| 摘要 |
A sensor includes a diaphragm having a through-hole (1), and includes a frame supporting a diaphragm and having a cavity. Kerfs are formed in a frame so as to extend from an end surface of the frame, and the wall surfaces of the kerfs are made hydrophilic. This structure can suppress the occurrence of bubbles in the vicinity of the through-hole, and efficiently remove the remaining bubbles. As a result, the bubbles adhering to the vicinity of the through-hole can be removed, and the measuring reliability of the sensor can be improved. |
