| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target for a radiation source generating radiation efficiently without using pre-pulse, and suppressing generation of debris. <P>SOLUTION: An extreme ultraviolet light source particles 10 is composed of: a foam-like structure 11 composed of a laminated membrane of a polymer electrolyte; and a tin layer 12 carried on the foam-like structure 11. If a diameter of the extreme ultraviolet light source particle 10 is made large, it can make the target composed of single extreme ultraviolet light source particles, and if the diameter of the extreme ultraviolet light source particle 10 is made small, and a large number of the particles are dispersed in a liquified inert gas or the like, droplets of its dispersed liquid can be made as the target. Such a target has an enough amount of plasma source material to become plasma by one pulse of laser beam, and by making it a size coping with the diameter of the pulse laser beam, the extreme ultraviolet light is generated efficiently. If gold and copper or the like are used in place of tin, the target for the radiation source to generate radiation except the extreme ultraviolet light is obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT |
