| 摘要 |
FIELD: physics.SUBSTANCE: optical image forming apparatus has one or more wave front aberration detectors designed to obtain one or more wave front aberrations in return beams arising when scanning an object with multiple measurement beams, and a single wave front aberration corrector designed to correct wave front aberration in each of the return beams entering at different angles, based on wave front aberration obtained by a wave front aberration detector.EFFECT: shorter time of obtaining an image, high resolution.12 cl, 17 dwg |
