发明名称 PROCESS FOR PRODUCING A FILM, FOR EXAMPLE A SINGLE-CRYSTAL FILM, ON A POLYMER SUBSTRATE
摘要 <p>A method for obtaining a film made out of a first material on a polymer support, said method comprising bonding a first wafer to a second wafer, thereby defining a bonding interface between said first wafer and said second wafer, at least one of said first and second wafers comprising a layer of said first material situated in proximity to said bonding interface, in said first wafer, hollowing out a cavity, said cavity comprising a bottom parallel to said bonding interface that defines, in said first wafer, a bottom zone at a controlled distance relative to said second wafer, forming, in said cavity, a polymer layer on a thickness controlled from a bottom thereof to obtain a combined wafer portion, said combined wafer portion comprising a bottom zone formed by said polymer layer on said bottom and a peripheral zone, and eliminating said second wafer on a major portion of a thickness thereof, thereby releasing, beneath said polymer layer, a film comprising said layer of said first material.</p>
申请公布号 EP2612352(A1) 申请公布日期 2013.07.10
申请号 EP20110748936 申请日期 2011.08.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 MORICEAU, HUBERT;ARGOUD, MAXIME;MORALES, CHRISTOPHE;ZUSSY, MARC
分类号 H01L21/762 主分类号 H01L21/762
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