摘要 |
<p>[Problems] To provide a spherical aluminum nitride powder that features high thermal conductivity and filling property, and that is useful as a filler for a heat radiating material, and a method of producing the same. [Means for Solution] A spherical aluminum nitride powder comprising aluminum nitride particles having an average particle diameter of 3 to 30 µ m, a sphericalness of not less than 0.75, and an oxygen content of not more than 1% by weight wherein, when the average particle diameter is d ( µ m), the specific surface area S (m 2 /g) satisfies the following formula (1),</p> |