发明名称 SOURCE ASSEMBLY AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME
摘要 PURPOSE: A source assembly and a substrate deposition apparatus for flat panel display having the same are provided to prevent a consumption of a stabilization time by improving a phenomenon in which the sensing amount of deposition material changes when opening and closing a shutter. CONSTITUTION: A main body part (125) has at least one source box (121a). The source box accommodates a source which provides a deposition material for a substrate deposition. A sliding shutter (131) is arranged in the opening part of the source box. The sliding shutter opens and closes the opening part of the source box in a sliding way. An angle limiting board limits the deposition area of the deposition material.
申请公布号 KR20130078922(A) 申请公布日期 2013.07.10
申请号 KR20120000079 申请日期 2012.01.02
申请人 SFA ENGINEERING CORP. 发明人 KIM, YOUNG MIN;JEON, YONG BAE;KIM, YOUNG DO;KANG, CHANG HO;OH, HAN SEONG
分类号 H01L51/56 主分类号 H01L51/56
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