发明名称 |
SOURCE ASSEMBLY AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME |
摘要 |
PURPOSE: A source assembly and a substrate deposition apparatus for flat panel display having the same are provided to prevent a consumption of a stabilization time by improving a phenomenon in which the sensing amount of deposition material changes when opening and closing a shutter. CONSTITUTION: A main body part (125) has at least one source box (121a). The source box accommodates a source which provides a deposition material for a substrate deposition. A sliding shutter (131) is arranged in the opening part of the source box. The sliding shutter opens and closes the opening part of the source box in a sliding way. An angle limiting board limits the deposition area of the deposition material.
|
申请公布号 |
KR20130078922(A) |
申请公布日期 |
2013.07.10 |
申请号 |
KR20120000079 |
申请日期 |
2012.01.02 |
申请人 |
SFA ENGINEERING CORP. |
发明人 |
KIM, YOUNG MIN;JEON, YONG BAE;KIM, YOUNG DO;KANG, CHANG HO;OH, HAN SEONG |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|