| 摘要 |
PURPOSE: An organic material deposition method is provided to prevent an organic material from being sprayed to the surrounding area by sticking an organic film on a substrate with high tightness. CONSTITUTION: An organic material film (20) is attached to a substrate (10) in a vacuum state. The substrate is located in a confined area. The organic material of the organic material film is transferred to the substrate in an overpressure atmosphere. The substrate is settled in a substrate tray (100). The substrate tray is equipped with an adhesion chuck (110).
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