发明名称 APPARATUS AND METHODS FOR MANUFACTURING THIN-FILM SOLAR CELLS
摘要 <p>Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web.</p>
申请公布号 EP2291855(A4) 申请公布日期 2013.07.10
申请号 EP20090755549 申请日期 2009.04.15
申请人 GLOBAL SOLAR ENERGY, INC. 发明人 BRITT, JEFFREY, S.;ALBRIGHT, SCOT
分类号 H01L21/00 主分类号 H01L21/00
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