SUBSTRATE HAVING THIN FILM OF JOINED AND METHOD OF FABRICATING THEREOF
摘要
PURPOSE: A thin film bonding substrate and a method for fabricating the same are provided to prevent cracks by forming a buffer layer between a crystalline thin film and a heterogeneous substrate. CONSTITUTION: A heterogeneous substrate (130) is bonded to a crystalline thin film (110). The chemical composition of the heterogeneous substrate is different from the chemical composition of the crystalline thin film. A buffer layer (120) is formed between the crystalline thin film and the heterogeneous substrate. The buffer layer is made of a transparent conductive material. The thickness of the buffer layer is 10 nm to 10 μm.
申请公布号
KR20130078983(A)
申请公布日期
2013.07.10
申请号
KR20120000183
申请日期
2012.01.02
申请人
SAMSUNG CORNING PRECISION MATERIALS CO., LTD.
发明人
SHIN, SEONG HWAN;KIM, DONG HYUN;KIM, MIN JU;PARK, TAE JUNG;JEON, JONG PIL;CHUNG, BYUNG KYU;PARK, CHEOL MIN