发明名称 |
HYBRID GAS INJECTOR |
摘要 |
A gas injector for use in injecting process gas into a space in a vertical furnace between a tower supporting multiple wafers and a tubular liner includes a tubular straw having an open distal end and a first bore extending along a first axis and composed of a first single material selected from the group consisting of silicon, quartz, and silicon carbide, and a connector detachably connected to the straw section, composed of a second material other than the first material and including a supply tube having a second bore extending along a second axis perpendicular to the first axis and in fluid communication with the first bore and having a distal end connectable to a gas supply line. |
申请公布号 |
EP2481082(A4) |
申请公布日期 |
2013.07.10 |
申请号 |
EP20100819542 |
申请日期 |
2010.09.24 |
申请人 |
FERROTEC (USA) CORPORATION |
发明人 |
O'MOORE, FERGAL;WILLIAMS, KARL;LE, NAM;BROWN, VINCENT |
分类号 |
H01L21/22;C23C16/455;C30B25/14;H01L21/205;H01L21/67 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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