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发明名称
SILICON POLISHING COMPOSITIONS WITH HIGH RATE AND LOW DEFECTIVITY
摘要
申请公布号
EP2611878(A2)
申请公布日期
2013.07.10
申请号
EP20110822449
申请日期
2011.08.30
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
WHITE, MICHAEL;ROMINE, RICHARD;REISS, BRIAN;GILLILAND, JEFFREY;JONES, LAMON
分类号
C09K3/14;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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