| 摘要 |
FIELD: machine building.SUBSTANCE: substrate is subjected to ion-beam cleaning and heating at the rate of 70 K/min to 650 K. Bottom layer of titanium Ti is applied thereon in the medium of inert gas at final temperature of the coating after deposition of 615-630 K. Then, alternate layers of two-component titanium nitride TiN with polycrystalline structure and two-component titanium nitride TiN with nano-crystalline structure are applied in the medium of argon-nitrogen mix with nitrogen content of, at least, 90%. Layer of two-component titanium nitride TiN with polycrystalline structure is applied at gradual increase in coating temperature to 645-675 K at heating rate of 3.2-4.4 K/min. Layer of two-component titanium nitride TiN with nano-crystalline structure is applied at gradual increase in coating temperature to 695-725 K at heating rate of 3.7 K/min. Layers of coating are applied by evaporation of two titanium cathodes while deposition of alternating layers is reiterated no more than two times. Layer of two-component titanium nitride TiN with nano-crystalline structure is applied the last.EFFECT: high-efficiency sandwich coating with stable mechanical properties.5 dwg, 1 tbl |
