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发明名称
摘要
申请公布号
JP5231733(B2)
申请公布日期
2013.07.10
申请号
JP20060319329
申请日期
2006.11.27
申请人
发明人
分类号
H01L23/522;H01L21/3205;H01L21/768
主分类号
H01L23/522
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