| 摘要 |
<p>A shielding arrangement is described for a cathodic arc deposition apparatus (10) which includes a contactor (22) formed from an electrically conductive material and having an axially extending shaft (24) and a cathode (14). The shielding arrangement includes a cup (26) formed from an electrically conductive material surrounding a portion of the contactor shaft (24) and a shield (40) for preventing material from being deposited on the cup (26). The shielding arrangement includes a removable ring shield (40) attached to the cup (26) and a cylindrical shield (50) formed from an electrically nonconductive material surrounding the cup (26) and a portion of the shaft (24).</p> |
