CLUSTER TYPE EVAPORATION DEVICE FOR MANUFACTURING OF OLED

摘要

PURPOSE: A cluster type deposition apparatus for producing a large amount of organic light emitting devices is provided to improve productivity by reducing a time loss according to a deposition process. CONSTITUTION: One or more deposition chambers (10) perform a thin film deposition process in a processed substrate. A transfer chamber (20) is formed with one module. The transfer chamber carries the processed substrate in and out. The transfer chamber carries a process substrate in and out. A buffer chamber installs a deposition inspection unit (200).