THERMOSETTING SILICON RESIN FOR MULTIFUNCTIONAL ANTIREFLECTIVE COATING AND ANTIREFLECTIVE COATING MANUFACTURED THEREOF

摘要

PURPOSE: A thermosetting silicon resin is provided to form a multifunctional si-antireflective coating which has en excellent penetration ratio and durability with high silicon content thereby reducing a cost and simplifying a semiconductor process through miniaturizing a circuit. CONSTITUTION: A thermosetting silicon resin for manufacturing a multifunctional si-antireflective coating (Si-ARC) is indicated as the following chemical formula 3 and chemical formula 4. From the previously mentioned chemical formulas, Ra is phenyl which has large absorbency in 193 nm region or C1-15 vinyl which includes benzene ring, aryl alkyl group or perfluoroalkyl group; m and n are the whole number of 1-100; P is the group which capable of additionally reacting 1-100 % of a silanol group of the chemical formula 3 with isobutyl vinyl ether, ethoxyethene, methoxyethene, methacrylate, urethane acrylate group.