| 摘要 |
PURPOSE: A device and a method of generating plasma are provided to resolve a vacuum sealing problem and offer the convenience of maintenance. CONSTITUTION: A plasma generating device (100a) includes a gas distribution board (160), a first line (140), a second line (130), contact plugs (190), and a plurality of power electrodes (110). The gas distribution board includes a gas diffusion space (150) which receives gas from the outside and distributes the same. The first line is arranged on the upper part of the gas diffusion space, receives power from an external RF power source (180), and distributes the power. The second line is arranged on the lower part of the gas diffusion space, receives the power from the first line, and distributes the power again. The power electrodes are formed on the lower part of the gas distribution board and form plasma by being electrically connected to the second line. [Reference numerals] (AA) First direction; (BB) Second direction; (CC) Third direction |
