| 摘要 |
An acceleration sensor includes: a rectangular moving electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b) which connect to centers of two opposite sides of the moving electrode (4, 5), and support the moving electrode (4, 5) freely swingably; and first and second fixed electrodes (20a, 20b, 21 a, 21 b) which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode (4, 5) at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode (4, 5), first and second recessed portions (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on one side of the boundary line and the other side thereof, respectively. |
