| 摘要 |
PURPOSE: A measuring apparatus is provided to reduce the sizes of a thickness measuring device and a distance measuring device by measuring a thickness and a distance using a planar optical waveguide structure. CONSTITUTION: A planar optical waveguide(40) including an optical coupler(50) is formed on a wafer substrate. A thermoelectric device layer is arranged on the lower side of the wafer substrate and controls a temperature of the planar optical waveguide. A light emitting unit(20) emits light to the planar optical waveguide. A reference light reflecting unit receives reference light and reflects the reference light. A reference light optical fiber(111) is connected to the end of the planar optical waveguide of the reference light and extends an optical path. A thermoelectric device(81) is installed under the reference light optical fiber. [Reference numerals] (130) Electronic control circuit unit; (140) Signal processing unit |
