发明名称 A METHOD OF SCAN TYPE DEVELOPING PHOTOREGIST
摘要 PURPOSE: A developing process of scan-type photosensitive film is provided not to generate a developing time gap between one side and the other side of a photosensitive film and to uniformly develop a photosensitive film by using scan-type development method. CONSTITUTION: A developing process of scan-type photosensitive film comprises the steps of: firstly coating a developer (50) from one side (30) to the other side of a photosensitive film, providing a first puddle time for the firstly coated developer and the photosensitive film to react, removing the firstly coated developer after the first puddle time, secondly coating the developer while scanning the photosensitive film from the other side to one side, providing the second puddle time for the secondly coated developer and the photosensitive film to react, and removing the secondly coated developer after the second puddle time.
申请公布号 KR20130077209(A) 申请公布日期 2013.07.09
申请号 KR20110145796 申请日期 2011.12.29
申请人 HYDIS TECHNOLOGIES CO., LTD. 发明人 YUN, SEONG JUNG
分类号 G03F7/26;G03F7/00;G03F7/30 主分类号 G03F7/26
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