| 摘要 |
[Problem] To perform accurate inspection by radiating light corresponding to characteristics of a pad and a resist. [Solution] An inspection apparatus (1) of a printed board (7) is provided with: a red LED (32), which is disposed at a first angle such that the red LED is a bright-field illumination apparatus with respect to a camera (6); a second color light source (4), i.e., a diffused illumination apparatus using a green fluorescent lamp; and a third color light source (5), which is disposed at a third angle such that the third color light source is a dark-field illumination apparatus with respect to the camera (6), and is configured of a blue LED. An image of the printed board (7) is photographed by means of the camera (6) using light emitted from the light sources, from the first light source (3) to the third light source (5), and scratches (71b) and a hit mark (71c) on a pad surface and whether the pad surface has a color change or not are inspected using an image obtained by means of light emitted from the red LED (32), i.e., the bright-field illumination apparatus. Furthermore, a forming state of a profile (71a) of a pad (71) is inspected using an image obtained by means of light emitted from the fluorescent lamp, i.e., the green diffused illumination apparatus. Furthermore, pool and chipping of the resist (72), and disconnection and short-circuiting of a resist lower pattern are inspected using an image obtained from the third light source (5), i.e., the blue LED. |
