发明名称 METHOD OF MOUNTING SEMICONDUCTOR CHIPS, SEMICONDUCTOR DEVICE OBTAINED USING THE METHOD, METHOD OF CONNECTING SEMICONDUCTOR CHIPS, AND THREE-DIMENSIONAL STRUCTURE, ON THE SURFACE OF WHICH WIRING IS PROVIDED AND FABRICATION METHOD THEREOF
摘要 One aspect of the present invention is a method of mounting a semiconductor chip having: a step of forming a resin coating 3 on a surface of a path connecting a bonding pad 2a on a surface of a semiconductor chip 2 and an electrode pad 1a formed on a surface of an insulating base material 1; a step of forming, by laser beam machining, a wiring gutter 4 having a depth that is equal to or greater than a thickness of the resin coating 3 along the path for connecting the bonding pad 2a and the electrode pad 1 a; a step of depositing a plating catalyst 5 on a surface of the wiring gutter 4; a step of removing the resin coating 3; and a step of forming an electroless plating coating 6 only at a site where the plating catalyst 5 remains. Another aspect of the present invention is a three-dimensional structure in which a wiring is formed on a surface, wherein, on the surface of the three-dimensional structure, a recessed gutter for wiring is formed, extending between mutually intersecting adjacent faces of the three-dimensional structure, and wherein at least a part of a wiring conductor is embedded in the recessed gutter for wiring.
申请公布号 KR101284376(B1) 申请公布日期 2013.07.09
申请号 KR20117016257 申请日期 2010.01.26
申请人 发明人
分类号 H01L21/60;H01L23/52 主分类号 H01L21/60
代理机构 代理人
主权项
地址