| 摘要 |
There are provided a temperature compensation method for a force sensor and the force sensor which can perform temperature compensation in not only the steady range where the output by the force sensor is stable but also the transient range where the output is unstable. The force sensor temperature compensation method of the present invention eliminates the effect of an environmental temperature from a sensor output value indicating the output value by the force sensor in the transient range where the output by the force sensor is unstable or in the steady range where the output is stable, and includes a preparation step of obtaining the varying pattern of a monitoring output value indicating the environmental temperature in the transient range before the force sensor is measuring an external force, and a correction step of estimating a varying pattern based on a change rate of the monitoring output value while the force sensor is measuring the external force, and of correcting a sensor output value using a correction value obtained based on the estimated varying pattern.
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