| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring a three-dimensional shape of a silica glass crucible that enables measurement of a three-dimensional shape of an inner surface of the crucible without contaminating the inner surface of the crucible.SOLUTION: A method for measuring a three-dimensional shape of a silica glass crucible includes the steps of: misting up an inner surface of a silica glass crucible having a transparent silica glass layer on an inner surface side and a bubble-containing silica glass layer on an outer surface side; irradiating the inner surface with light and detecting the reflected light to measure a three-dimensional shape of the inner surface; moving an inner distance-measuring part along the inner surface of the silica glass crucible in a noncontact manner on the basis of the three-dimensional shape; irradiating the inner surface of the silica glass crucible with laser light obliquely thereto from the inner distance-measuring part, detecting inner surface reflected light from the inner surface and interface reflected light from an interface between the transparent silica glass layer and the bubble-containing silica glass layer, and thereby calculating a three-dimensional coordinate of each measuring point so as to measure three-dimensional shapes of the inner surface and the interface. |
