| 摘要 |
PURPOSE: A transparent conductive film is provided to ensure stable specific resistivity and thermal stability by comprising titanium in indium tin oxide and tin oxide. CONSTITUTION: A transparent conductive film with excellent thermal stability comprises a mixture in which titanium is mixed with indium tin oxide and tin oxide. A method for preparing the transparent conductive film comprises the steps of: (S11) preparing raw material powders including an induim oxide powder or rare earth metal indium powder, tin oxide powder or metal tin powder, and titanium oxide powder or metal titanium powder as a main component; (S12) forming a transparent conductive film from the raw material powders using a sputtering apparatus; and (S13) heat-treating the formed transparent conductive film at a temperature of 300°C or less. |
