发明名称 |
THIN FILM MANUFACTURING DEVICE, THIN-FILM MANUFACTURING METHOD, DROPLET DISCHARGE HEAD, AND INK JET RECORDING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a thin film manufacturing device and a thin-film manufacturing method, capable of manufacturing a thin film such as an electromechanical conversion film in a simple process.SOLUTION: The thin film manufacturing device comprises: liquid discharge means which discharges a liquid and forms a coated film on an object to be deposited; first laser irradiation means which continuously irradiates the coated film with a laser beam and evaporates a solvent of the coated film; and second laser irradiation means which irradiates the coated film whose solvent has been evaporated with a pulsed laser beam and crystallizes the coated film whose solvent has been evaporated. |
申请公布号 |
JP2013135165(A) |
申请公布日期 |
2013.07.08 |
申请号 |
JP20110286157 |
申请日期 |
2011.12.27 |
申请人 |
RICOH CO LTD |
发明人 |
YAGI MASAHIRO;MACHIDA OSAMU;TASHIRO RYO;MELANIE MEIXNER;JOCHEN STOLLENWERK |
分类号 |
H01L41/22;B05C9/14;B23K26/00;B23K26/067;B23K26/073;B41J2/16 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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