发明名称 THIN FILM MANUFACTURING DEVICE, THIN-FILM MANUFACTURING METHOD, DROPLET DISCHARGE HEAD, AND INK JET RECORDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thin film manufacturing device and a thin-film manufacturing method, capable of manufacturing a thin film such as an electromechanical conversion film in a simple process.SOLUTION: The thin film manufacturing device comprises: liquid discharge means which discharges a liquid and forms a coated film on an object to be deposited; first laser irradiation means which continuously irradiates the coated film with a laser beam and evaporates a solvent of the coated film; and second laser irradiation means which irradiates the coated film whose solvent has been evaporated with a pulsed laser beam and crystallizes the coated film whose solvent has been evaporated.
申请公布号 JP2013135165(A) 申请公布日期 2013.07.08
申请号 JP20110286157 申请日期 2011.12.27
申请人 RICOH CO LTD 发明人 YAGI MASAHIRO;MACHIDA OSAMU;TASHIRO RYO;MELANIE MEIXNER;JOCHEN STOLLENWERK
分类号 H01L41/22;B05C9/14;B23K26/00;B23K26/067;B23K26/073;B41J2/16 主分类号 H01L41/22
代理机构 代理人
主权项
地址