发明名称 NEEDLE SCRIBING APPARATUS FOR FABRICATING THIN FILM SOLAR CELL
摘要 <p>PURPOSE: A needle scribing apparatus for fabricating a thin film solar cell is provided to improve the accuracy of a groove line by using an actuator for controlling the movement of a needle. CONSTITUTION: A needle (220) forms a groove line. The needle is in contact with a thin film layer. The needle and the thin film layer move together. A voice coil motor (VCM) actuator (210) moves the needle up and down. The needle applies constant pressure to the thin film layer. The pressure depends on preset input data.</p>
申请公布号 KR20130076441(A) 申请公布日期 2013.07.08
申请号 KR20110145032 申请日期 2011.12.28
申请人 EMTECH CO., LTD. 发明人 KIM, SANG OH;LEE, HONG;LEE, HWANG JIN
分类号 H01L31/18;B26D3/06;H01L31/042 主分类号 H01L31/18
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