发明名称 |
NEEDLE SCRIBING APPARATUS FOR FABRICATING THIN FILM SOLAR CELL |
摘要 |
<p>PURPOSE: A needle scribing apparatus for fabricating a thin film solar cell is provided to improve the accuracy of a groove line by using an actuator for controlling the movement of a needle. CONSTITUTION: A needle (220) forms a groove line. The needle is in contact with a thin film layer. The needle and the thin film layer move together. A voice coil motor (VCM) actuator (210) moves the needle up and down. The needle applies constant pressure to the thin film layer. The pressure depends on preset input data.</p> |
申请公布号 |
KR20130076441(A) |
申请公布日期 |
2013.07.08 |
申请号 |
KR20110145032 |
申请日期 |
2011.12.28 |
申请人 |
EMTECH CO., LTD. |
发明人 |
KIM, SANG OH;LEE, HONG;LEE, HWANG JIN |
分类号 |
H01L31/18;B26D3/06;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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