APPARATUS FOR INSPECTION OF ELECTROLUMINESCENCE SAMPLE

摘要

PURPOSE: An electroluminescence (EL) sample analyzing device is provided to confirm the information with respect to charge traps existed inside an EL emitting element. CONSTITUTION: An EL sample analyzing device (100) comprises a pulse generator (110), an image photographing device (120), an electroluminescence transient spectroscopy (ELTS) analyzing unit (130). The pulse generating device applies pulse driving signals to an EL sample (10). The image photographing device photographs EL images with respect to a transient section of light receiving signals which receives the EL emitted from the EL sample when the pulse driving signals are applied. The ELTS analyzing unit generates three-dimensional mapping images in which a difference of the intensity of the light emitting signals of at least two timings with respect to identical coordinates included in the EL images are mapped according to the passage of time and obtains the information with respect to the defective charge traps from the EL sample by analyzing the generated three-dimensional mapping images. [Reference numerals] (130) ELTS analyzing unit; (AA) Inside; (BB) EL image; (CC) Image difference; (DD) Image analysis; (EE) Pass/fall (total inspection)l or grading