| 摘要 |
PURPOSE: A nano-lattice manufacturing method for an X-ray interferometer is provided to align multi-layered thin films of a nanoscale separately from each other at tens of meters to be parallel to an optical axis. CONSTITUTION: A nano-lattice structure includes a substrate (100), a first thin film laminated structure, and a second thin film laminated structure. A first material layer semi-transmits X-rays and becomes laminated by being deposited on a predetermined area on the substrate. A second material layer transmits X-rays and becomes laminated on the top surface or the underside of the first material layer. The first and second material layers are deposited and alternately laminated so that the first thin film laminated structure is formed. Third material layer is laminated on a portion spaced at a predetermined distance from the first thin film laminated structure and absorbs X-rays. A fourth material layer is laminated on the top surface of the underside of the third material layer and transmits the X-rays. The third material layer and at least one fourth material layer are alternately laminated so that the second thin film laminated structure is formed.
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