发明名称 DICING SHEET WITH PROTECTIVE FILM FORMING LAYER AND CHIP MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dicing sheet with a protective film forming layer, which enables simple manufacturing of a semiconductor chip having a highly uniform thickness and excellent printing precision and which has excellent expandability.SOLUTION: A dicing sheet with a protective film forming layer comprises: a laminated sheet having a base film and a heat-resistant film; a protective film formation layer formed on an inner peripheral part of a surface of the heat-resistant film; and adhesive layers formed on outer peripheral parts of the surface of the heat-resistant film. The heat-resistant film has a melting point of above 130°C or has no melting point. The heat-resistant film has thermal shrinkage from -1% to +1% in heating at 130°C for two hours.
申请公布号 JP2013135041(A) 申请公布日期 2013.07.08
申请号 JP20110283427 申请日期 2011.12.26
申请人 LINTEC CORP 发明人 SHINODA TOMONORI;TAKANO TAKESHI;KATA AKIO
分类号 H01L21/301;C09J7/02 主分类号 H01L21/301
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