ELECTROMECHANICAL CONVERSION ELEMENT, MANUFACTURING METHOD OF ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND INK JET RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin film manufacturing device and a thin film manufacturing method which allow only a desired region of a heated object to be selectively heated.SOLUTION: A manufacturing method of an electromechanical conversion element includes the steps: depositing a metal electrode on a substrate; depositing an oxide electrode on the metal electrode; forming a metal film having an opening which exposes a part of the oxide electrode on the oxide electrode; and forming a coating film on the oxide electrode exposed in the opening; radiating a laser beam to the coating film to form an electromechanical conversion film. A light absorption rate of the oxide electrode for the laser beam is higher than a light absorption rate of the metal film for the laser beam.