| 摘要 |
The invention provides a microscope device capable of easily peforming aligning operation of measure points and having a low price. The microscope device is provided with an XY objective table (22) which horizontally moves an article to be examined; an observation optical system (10) used for observe the article to be examined; a Z objective table (15) which moves an object lens (11) for observing an optical system; a focus detection system (30) which irradiates a measure light to the article to be examined and detects focusing; a translucence lens (17) which optically combines the focus detection system and the object lens; a signal processing unit (41) which controls the Z objective table according to a detection result of the focus detection system; and a measuring unit (42) which measures a shifting amount of the object lens moving through the Z objective table. The microscope device further includes two cuneate prisms (51a, 51b) configured on an optical path between the focus detection system and the translucence lens; and a rotation mechanism (52a, 52b) which holds the translucence lens in a ratatable state. |
