发明名称 MANUFACTURING DEVICE FOR PHOTOELECTRIC CONVERSION CELL AND MANUFACTURING METHOD FOR PHOTOELECTRIC CONVERSION CELL
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing device for manufacturing a photoelectric conversion cell having high photoelectric conversion efficiency, and a manufacturing method for the photoelectric conversion cell.SOLUTION: A manufacturing device for a photoelectric conversion cell including a substrate 1, a lower electrode provided on the substrate 1, and a photoelectric conversion layer provided on the lower electrode, comprises: support means for supporting the substrate 1; scribing means having a machining tool 15 which removes a part of the photoelectric conversion layer by scribing; and moving means for moving at least one of the support means and the scribing means in one direction. In this embodiment, the machining tool 15 includes an abutting part abutting on an upper surface of the lower electrode and a recess adjacent to the abutting part and extending in the one direction.
申请公布号 JP2013135174(A) 申请公布日期 2013.07.08
申请号 JP20110286330 申请日期 2011.12.27
申请人 KYOCERA CORP 发明人 UESUGI TAKESHI
分类号 H01L31/04 主分类号 H01L31/04
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