| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of a defect such as a surface flaw, a chipping, a scratch or a surface crack defect in manufacture of a glass substrate.SOLUTION: A suction plate 59 at a tip of a first arm 58 sucks a doughnut-like glass substrate 4 at the top layer of a doughnut-like glass block 3. When a pressure sensor 61 detects the suction by the suction plate 59, the first arm 58 is pulled up and the glass substrate 4 is separated from the glass block 3. The glass substrate 4 is moved to a disk holder 54 by a cylinder 56, and when a position sensor 60 detects that the glass substrate 4 reaches a prescribed position, a pump 57 releases the suction and the glass substrate 4 is stored in the disk holder 54. A bonding agent F at the top layer of the glass block 3 is peeled off from a glass substrate 4 in a layer below it by sweeping its surface while pressing it by a roller 62a at a tip of a second arm 62. The bonding agent F which has been peeled off is led to a prescribed recovery position by a water flow in a water tank 51. |
