| 摘要 |
PROBLEM TO BE SOLVED: To appropriately adjust a quantity of light according to a change in light output in an exposure device provided with a DMD.SOLUTION: To adjust a quantity of light, the effective mirror of the DMD is turned on, a quantity of projected light is measured, and a use ratio R, which is the ratio of a quantity of measured light to the target quantity of light, is determined. Then, on the basis of the use rate R, dimmer filter data, which indicate the arrangement of mirrors that are not in use, are created. At this time the mirrors that are not in use are arranged such that a change in the quantity of light is substantially even as the entire area. |
