| 摘要 |
A gripper for transferring a semiconductor device and a semiconductor manufacturing apparatus including the same are provided to improve transfer efficiency by transferring and carrying out the semiconductor material through one gripper. A gripper(100) includes a body part(104), a movement driving power generator, a gripper(108) and a push part(110). The body part moves along a rail(102) with a predetermined length. The movement driving power generator(106) generates the driving power for moving the body part. The movement driving power generator includes a driving motor(106a), a rotation belt(106b) and a pulley(106c). The gripper is combined in one side of the body part. The gripper grips the semiconductor material in a supply standby position. The gripper transfers the semiconductor material to a working position. The push part is combined in the other side of the body part. The push part transfers the semiconductor material in the working position. |
