| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device capable of keeping a gripping force constant when a pitch is changed.SOLUTION: A substrate holding device includes: a support mechanism 12 which changes a pitch of a plurality of substrate holding bodies 10; a biasing mechanism 18 which is installed in each substrate holding body 10 and biases a moving body 16 so that a substrate is pressed and gripped by a movable holding member 24; and a pushing-back mechanism 20 which releases the pressing and gripping of a substrate by the movable holding member 24. A pushing-back part 60 of the pushing-back mechanism 20 can be positioned in a standby position where the pushing-back part 60 is not in contact with the movable body 16. |
