发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a capacitor capable of inhibiting voltage fluctuation in a high-frequency band.SOLUTION: A semiconductor device comprises a capacitor including: a first semiconductor region 2 of a first conductivity type; a second semiconductor region 3 of the first conductivity type formed on the first semiconductor region 2 of the first conductivity type and having a first conductivity type impurity concentration higher than that of the first semiconductor region 2 of the first conductivity type; a semiconductor region 4 of a second conductivity type formed on the second semiconductor region 3 of the first conductivity type; a dielectric film 5 formed on the semiconductor region 4 of the second conductivity type; and an upper electrode 7a formed on the dielectric film 5.
申请公布号 JP2013135059(A) 申请公布日期 2013.07.08
申请号 JP20110283771 申请日期 2011.12.26
申请人 FUJITSU LTD 发明人 TASHIRO HIROKO;ISHIZUKA TAKESHI
分类号 H01L21/822;H01L21/8234;H01L27/04;H01L27/06 主分类号 H01L21/822
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