发明名称 POLISHING PAD AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a polishing pad containing minute air bubbles almost uniform in thickness direction and provided with an opening part already without requiring an opening process such as surface grinding, and a method of manufacturing the same.SOLUTION: The method of manufacturing a polishing pad includes a step (1) in which a mixture solution containing polyurethane resin and organic solvent is applied on a film forming base material, a step (2) in which the polyurethane resin is, after the application step, exposed to the atmosphere of temperature of 10-80°C and relative humidity of 65-100% for two minutes or longer, and a step (3) in which the polyurethane resin is submerged in congealing liquid for coagulation.
申请公布号 JP2013132741(A) 申请公布日期 2013.07.08
申请号 JP20110286574 申请日期 2011.12.27
申请人 FUJIBO HOLDINGS INC 发明人 KURIHARA HIROSHI;MIYAZAWA FUMIO
分类号 B24B37/24;B05D3/10;B05D7/24;C08J5/14;C08J9/28;H01L21/304 主分类号 B24B37/24
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