| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for holding a plate-like object, capable of securely suctioning and holding even a plate-like object having warpage.SOLUTION: A method for holding a plate-like object, in which a plate-like object having warpage is suctioned and held by a chuck table, includes: a chuck table preparing step of preparing the chuck table having a holding surface for holding the plate-like object and a suction path in which one end communicates with the holding surface and the other end is selectively connected to a suction source; a placing step of placing the plate-like object having warpage on the holding surface of the chuck table; a pressing step that comes after the placing step, of pressing an elastic member having an area larger than that of the plate-like object to the plate-like object from above the plate-like object to flatten the plate-like object; and a holding step that is executed while continuing the pressing step, of suctioning and holding the plate-like object by operating the suction source. |
