| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor element which suppresses peeling of a conductor and detects correct pressure, regardless of a use environment.SOLUTION: A pressure sensor element includes: an electrode 10; a piezoelectric film 11 provided on one main surface of the electrode 10; and a conductor film 12 provided so as to cover the piezoelectric film 11. The conductor film 12 partially has a slit 121. The conductor film 12 has the slit 121, so that stress is eased and weakened even if the conductor film 12 is expanded/contracted due to temperature change or warped due to a large load which is repeatedly applied. The slit 121 is partially provided, so that the conductor film 12 is connected around the slit 121, and the conductor film 12 is hard to be peeled off. Therefore, it is possible to issue a signal in proportion to external pressure and detect correct pressure. |
