| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the three-dimensional shape of a silica glass crucible, whereby the shape of the crucible can be measured in a non-destructive manner.SOLUTION: The method for measuring the three-dimensional shape of a silica glass crucible comprises steps of: moving an inner distance measurement unit in a non-contact manner along an inner surface of the silica glass crucible having a transparent silica glass layer on an inner-surface side and a bubble-containing silica glass layer on an outer-surface side; at a plurality of measurement points on a moving path, emitting a laser beam from the inner distance measurement unit in a direction oblique to the inner surface of the silica glass crucible; detecting the inner surface reflection reflected from the inner surface and an interface reflection reflected from an interface between the transparent silica glass layer and the bubble-containing silica glass layer, thereby measuring the inner surface distance between the inner distance measurement unit and the inner surface, and the interface distance between the inner distance measurement unit and the interface; and correlating three-dimensional coordinates at individual measurement points with the inner surface distance and the interface distance, thereby determining the three-dimensional shape of the inner surface and the interface. |
