METHOD FOR DETERMINING THREE-DIMENSIONAL DISTRIBUTION OF INFRARED ABSORPTION SPECTRUM OF SILICA GLASS CRUCIBLE, AND METHOD FOR MANUFACTURING SILICON MONOCRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for determining a three-dimensional distribution of an infrared absorption spectrum of a silica glass crucible with high precision.SOLUTION: According to the present invention, there is provided a method for determining a three-dimensional distribution of an infrared absorption spectrum of a silica glass crucible including the steps of: moving an inner distance-measuring part along an inner surface of the silica glass crucible in a noncontact manner; at a plurality of measuring points in a moving path, irradiating the inner surface of the silica glass crucible with laser light obliquely thereto from the inner distance-measuring part and detecting inner surface reflected light from the inner surface to measure an inner surface distance between the inner distance-measuring part and the inner surface; calculating a three-dimensional shape of an inner surface of the silica glass crucible by associating a three-dimensional coordinate of each measuring point with the inner surface distance; and determining a three-dimensional distribution of an infrared absorption spectrum of the inner surface by measuring an infrared absorption spectrum of the inner surface at a plurality of measuring points on the three-dimensional shape.