发明名称 PATTERN FORMING METHOD AND METAL PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a pattern forming method capable of efficiently forming a metal pattern which has a large film thickness and comprises a metal having a higher ionization tendency, and to provide a metal pattern.SOLUTION: A pattern forming method comprises the steps of: [1] forming a resin layer 2 from a first composition including α-cyanoacrylic acid ester on a substrate 1; [2] forming a removal part 3 in the resin layer 2 by irradiating the resin layer with a laser beam; [3] filling the removal part 3 with a second composition 4 including; a particle (A) containing metal oxide selected from a metal-metal oxide composite particle (A1) in which a portion containing a surface part is made of metal oxide and other portion except the portion containing the surface part is made of the metal, and a metal oxide particle (A2); alditol (B); and alditol oxide (C); and [4] heating the second composition 4 of the removal part and removing the resin layer 2. A metal pattern 5 is formed by this pattern forming method.
申请公布号 JP2013135070(A) 申请公布日期 2013.07.08
申请号 JP20110284119 申请日期 2011.12.26
申请人 JSR CORP 发明人 KAWAGUCHI KAZUO
分类号 H05K3/10;H05K3/00;H05K3/12 主分类号 H05K3/10
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